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| Titre: | The influence of substrate bias voltage on the electrochemical properties of ZrN thin films deposited by radio-frequency magnetron sputtering : biomedical application |
| Auteur(s): | Azibi, Mourad
Saoula, Nadia
Aknouche, Hamid |
| Mots-clés: | 316L stainless steel
Bias voltage
Corrosion
RF magnetron sputtering
ZrN |
| Date de publication: | 2019 |
| Editeur: | De Gruyter Open Ltd |
| Collection/Numéro: | Journal of Electrical Engineering/ Vol.70, N°7 (2019); |
| Résumé: | In order to study the influence of the substrate bias on the properties of ZrN thin films deposited by radio-frequency magnetron sputtering for biomedical application. Films of ZrN were grown onto 316L stainless steel substrate using radio-frequency (rf) magnetron sputtering from a pure zirconium target in Ar - N2 gas mixture. The substrate bias voltage was varied from 0 to -100 V, which produces a variation in the structural and electrochemical properties of the obtained films. The deposited films were characterized by X-Rays Diffraction, Atomic Force Microscopy, scanning force microscopy and potentiodynamic polarization |
| URI/URL: | DOI: 10.2478/jee-2019-0051
https://content.sciendo.com/view/journals/jee/70/7/article-p112.xml?language=en
http://dlibrary.univ-boumerdes.dz:8080/handle/123456789/6599 |
| ISSN: | 13353632 |
| Collection(s) : | Publications Internationales
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