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Titre: The influence of substrate bias voltage on the electrochemical properties of ZrN thin films deposited by radio-frequency magnetron sputtering : biomedical application
Auteur(s): Azibi, Mourad
Saoula, Nadia
Aknouche, Hamid
Mots-clés: 316L stainless steel
Bias voltage
Corrosion
RF magnetron sputtering
ZrN
Date de publication: 2019
Editeur: De Gruyter Open Ltd
Collection/Numéro: Journal of Electrical Engineering/ Vol.70, N°7 (2019);
Résumé: In order to study the influence of the substrate bias on the properties of ZrN thin films deposited by radio-frequency magnetron sputtering for biomedical application. Films of ZrN were grown onto 316L stainless steel substrate using radio-frequency (rf) magnetron sputtering from a pure zirconium target in Ar - N2 gas mixture. The substrate bias voltage was varied from 0 to -100 V, which produces a variation in the structural and electrochemical properties of the obtained films. The deposited films were characterized by X-Rays Diffraction, Atomic Force Microscopy, scanning force microscopy and potentiodynamic polarization
URI/URL: DOI: 10.2478/jee-2019-0051
https://content.sciendo.com/view/journals/jee/70/7/article-p112.xml?language=en
http://dlibrary.univ-boumerdes.dz:8080/handle/123456789/6599
ISSN: 13353632
Collection(s) :Publications Internationales

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